Fabrication of a 77 GHz Rotman Lens on a High Resistivity Silicon Wafer Using Lift-Off Process
نویسندگان
چکیده
منابع مشابه
Wafer scale aligned sub-25nm metal nanowires on Silicon (110) using PEDAL lift-off process
We have demonstrated a new PEDAL process to make sub-25 nm nanowires template across the entire Silicon (110) wafer suitable for wafer-scale nanoimprinting. The “PEDAL lift-off” has the ability to fabricate metal nanowires directly on the wafers without using nanoimprint techniques. The process involves defining the edge by etching a trench, patterned using conventional i-line lithography, and ...
متن کاملthe impact of portfolio assessment on iranian efl students essay writing: a process-oriented approach
this study was conducted to investigate the impact of portfolio assessment as a process-oriented assessment mechanism on iranian efl students’ english writing and its subskills of focus, elaboration, organization, conventions, and vocabulary. out of ninety juniors majoring in english literature and translation at the university of isfahan, sixty one of them who were at the same level of writing...
15 صفحه اولMembrane-supported Yagi-uda Millimeter-wave Antennas
This paper presents the design, fabrication and “on wafer” characterization of membrane-supported YagiUda CPW fed antenna structures. The antennas were designed for the 60 GHz and 77 GHz frequency operating ranges. The 60 GHz antennas were fabricated on a semi-insulating GaAs membrane using GaAs micromachining. The 77 GHz antennas were manufactured on 1.4 μm thin SiO2/Si3N4 membranes obtained b...
متن کاملFabrication of Bacteria Environment Cubes with Dry Lift-Off Fabrication Process for Enhanced Nitrification
We have developed a 3D dry lift-off process to localize multiple types of nitrifying bacteria in polyethylene glycol diacrylate (PEGDA) cubes for enhanced nitrification, a two-step biological process that converts ammonium to nitrite and then to nitrate. Ammonia-oxidizing bacteria (AOB) is responsible for converting ammonia into nitrite, and nitrite-oxidizing bacteria (NOB) is responsible for c...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: International Journal of Antennas and Propagation
سال: 2014
ISSN: 1687-5869,1687-5877
DOI: 10.1155/2014/471935